Wafer-Level光学(兵器连络官)

Market-leading WLO manufacturing portfolio, including step-and-repeat mastering, 镜头成型, nanoimprint lithography and stacking

介绍

EVG's wafer-level optics (WLO) manufacturing solutions enable a multitude of novel optical sensing devices for mobile consumer electronics products. 关键的例子包括3D传感, 生物认证技术, 环境遥感, infrared sensing and microlens arrays. Other applications include automotive front-lights, 光地毯, optical diffusers and medical imaging.
EVG's WLO solutions are supported by the company's NILPhotonics Competence Center.

分步重复掌握

Master stamps are wafer-size templates fully populated with microlens molds, each replicated from a single lens or lens array template in a step-and-repeat (S&R)方法. Starting from a single lens master made out of metal, 硅或玻璃, 亚美体育在线网页 offers all essential process steps for the fabrication of master stamps featuring unmatched lens position accuracies and lens shape repeatability.

了解更多关于EVG的信息®770 NT Step-and-Repeat Nanoimprint光刻 System

紫外显微镜头成型

Lens patterns are transferred into optical polymer materials by soft UV imprint lithography using working stamps replicated from the wafer-size master stamps. 亚美体育在线网页 offers hybrid and monolithic micro镜头成型 processes, which can be easily adapted to various material combinations for working stamp and microlens materials. EVG systems are our customers’ first choice for high-volume wafer-level lens replication.

了解更多关于智商校准器的信息® Automated UV Nanoimprint光刻 System

SmartNIL®

EVG provides market-leading UV-nanoimprinting equipment with its robust and field-proven SmartNIL 技术. Progress in photonic manufacturing processes and technologies as well as applications is closely linked to advances in equipment capabilities. 在这些, recent developments in SmartNIL offer additional degrees of freedom to manufacture innovative photonic structures with the highest functionality and smallest form factors at high volumes. 用这个技术, diffractive optical elements (DOEs) and optical waveguides can be easily integrated into miniaturized optical modules.

了解更多亚美体育在线网页的SmartNIL® 技术

镜头叠加

The final micro optics stack is fabricated by UV bonding of all elements, including individual double-side microlens wafers as well as spacer wafers, 以达到最终的堆栈高度. Crucial parameters are lens-to-lens alignment accuracy, total thickness variation and tilt of the resulting bond interface.

了解更多关于智商校准器的信息® Automated UV Nanoimprint光刻 System

特性

  • Efficient step-and-repeat master fabrication
  • Volume-proven imprinting 技术 with superior replication fidelity
  • Precision aligned 镜头成型 and stacking
  • 专有SmartNIL® 技术
  • Multiple-use polymer stamp 技术
  • 开放材料平台

数据

Elements of a typical wafer-level camera module include a CMOS image sensor, polymeric lenses molded onto glass carriers using UV imprint lithography, 间隔层和孔径层, 如下图所示.
Elements of a typical wafer-level camera module include a CMOS image sensor, polymeric lenses molded onto glass carriers using UV imprint lithography, 间隔层和孔径层, 如下图所示.
Photograph of lens wafer and a stacked wafer with fully functional optical modules
Photograph of lens wafer and a stacked wafer with fully functional optical modules
Wafer-level micro lens arrays created utilizing UV-NIL
镜头图案保真度测量
镜头图案保真度测量
SmartNIL® patterned optical nanostructures.  Source: EVG, Master provided by IMS Chips
SmartNIL® patterned optical nanostructures. Source: EVG, Master provided by IMS Chips

与亚美体育在线网页的EVG技术专家交流!

问题?

友情链接: 1 2 3 4 5 6 7 8 9 10